<FEATURES>

• Compact benchtop design 
• Precision 150mm (6 in.) x-y stage
• 1 in. adjustable z-chuck height
• 150 mm (6 in.) microwave chuck 
• Patented auxiliary chucks for calibration substrates 
• Switch-selectable vacuum zones
• 1 in. coaxial x-y microscope transport with safety lock
• Tilt-back high power microscope option with compound lift 
• High rigidity microwave platen, with precision linear lift
• Accommodates up to 4 microwave positioners 
• Microwave thermal chuck option (includes auxiliary chucks)

<Application>

• Accurate S-parameter device measurements
• Package and interconnect probing
• Hybrid probing, thermal analysis
• Electro-optic device probing
• Design engineering
• Production test, reliability testing
• Incoming inspection