<FEATURES>
 Wafer
Size
: 3" to 8" of Silicon, GaAs, etc.
Travel Resolution : less than 0.1um
Chuck leakage plus noise : less than 20fA
at non-thermal by patented FemtoGuarded
Chuck
Thermal chuck
Temperature
: -55'C to +200'C by patented MicroChamber
Software: Windows 95, Gallaxy, Wafer Mapping
Control, GP-IB, RS-232C
<Application>
General
electrical DC parametric test
fA level
low current measurement
Low
temperature Measurement
<Optional>
Laser Cutting System
Thermal Chuck System
Auto- focus Microscope
Integrated
Dark Box and Vibration Isolation Table
Other
model:
REL-5500 |
REL-6100