<FEATURES>
 Wafer
Size
: 3" to 8" of Silicon, GaAs, etc.
Travel Resolution : less than 0.1um
Chuck leakage plus noise : less than 20fA
at non-thermal by patented FemtoGuarded
Chuck
Thermal chuck Temperature : -55'C to +200'C
by patented MicroChamber
<Application>
General
electrical DC parametric test
fA level
low current measurement
Low
temperature measurement
<Optional>
Laser Cutting System
Thermal Chuck System
Auto-focus Microscope
Dark
Box
Vibration Isolation
Table
|
REL-4800