<FEATURES>
 Wafer Size : 3" to 8" of Silicon, GaAs, etc.
Wafer
loading : upto 50ea
(2 cassette)
Travel Resolution : less than 0.25um
R/F frequency : upto 110GHz for Network Analyzer, etc.
Ultra-low
loss : less than
0.25dB max.
Chuck
leakage plus noise
: 1fA at non-thermal by patented FemtoGuarded Chuck
Thermal
chuck Temperature
: -55'C to +200'C by patented MicroChamber
<Accessories>
DC parametric test : Probe card, Probe Needles,
Connectors, etc.
R/F test
: Pyramid Probe Card, Patented Air Coplanar Probe, NIST
verified ISS, Contact Substrate, WinCal Calibration
Software, etc
Operating Software : Windows NT
Link to popular software : ICMS, SPECS, KTE, ICS, IC-CAP,
SILVACO, SWORD, and all others
Link to Testers: HP4155/56, HP4062, HP4071,
Keithley S600, LTX, Teradyne, Advantest, etc.
<Application>
General electrical
DC parametric test
fA level low current measurement
Low temperature measurement
R/F test for S-parameter
Noise Parameter
Ft measurement
mm Wave measurement
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