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- 4 Point Probing System
C-V Map Measurement System
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- 4-Point Probing system (Sheet Resistivity Measurement)
R&D에서 부터 생산line용 까지 사용 용도별로 다양한 model의 Sheet Resistvity Measurement
- System으로 metals, epi, alloys, diffusion, ion implantation and polysilicon 및 GaAs, InP, LCD,
- Amorphous Silicon 등의 측정에 사용된다.
280I Series
- Resistivity tester for measuring bulk wafer, conductive films such as metals, epi, alloys,
diffusion, ion implantation and polysilicon
- Measurement range : 1E-3 to 8E5 ohm/sq
- 2" to 8" wafer
추가사양(Option)
- PC controlled with Windows based program
- Temperature Compensation function
- Extended measurement range up to 8E11 ohm/sq
- Hot Chuck and high temperature chamber
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680I Series
- Measuring for Compound Semiconductor such as GaAs and SiC
- Measurement range : 1E-2 to 4E4 ohm/sq
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980I Series
- Integrated Cassette to Cassette Sheet Resistivity Mapping
- Robotic Handler and Prealigner multiple cassette station
- Load/unload/sort criteria customer programmable
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- 300 Series
- 새로운 300mm wafer 전용 장비로 빠르고 정확한 Rs
measurement를 수행한다
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1100I Series
- Large size Flat Panel용 Automatic Rs measurement system
- Size : 340mmX400mm or 610mmX650mm
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CVmap 92A Station
- Quasi-Static CV, High Frequency CV, Pulsed CV,
General Lifetime, Leakage Current, etc.
- Multi Points measurement & 3D Mapping function
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CVmap 92A
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copyright(c) 1998 Yang Electronic Systems
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